Nanofabrication by ion-beam sputtering : fundamentals and applications /
edited by Tapobrata Som, Dinakar Kanjilal.
- 1 online resource (xix, 335 pages)
1. Elements of sputtering theory / Peter Sigmund -- 2. Sputter-ripple formation on flat and rough surfaces : a case study with Si 41 / Safiul Alam Mollick and Debabrata Ghose -- 3. Low-energy ion-induced pattern formation in Si-Ge alloy / Subhendu Sarkar -- 4. Patterning of ionic insulator surfaces with low-energy ion beams / Franciszek Krok. [et al.] -- 5. Nanostructures on thin films by keV ion beams / Prasanta Karmakar -- 6. Surface nanopatterns on Si(100) by normal-incidence ion sputtering with metal incorporation / Raul Gago. [et al.] -- 7. Kinetic Monte Carlo simulations of low-energy ion-induced surface patterning / Wai-Lun Chan and Eric Chason -- 8. From cascades to patterns : a Monte Carlo approach / Reiner Kree and Taha Yasseri -- 9. Understanding surface patterning by lattice gas models / Geza Odor, Bartosz Liedke, and Karl-Heinz Heinig -- 10. Applications of ion beam patterned substrates in plasmonics / Mukesh Ranjan, Thomas W.H. Oates, and Stefan Facsko.
9780429086540
10.1201/b13726 doi
Nanotechnology.
Materials science.
T174.7 / .N36 2013
620.5 / N186
1. Elements of sputtering theory / Peter Sigmund -- 2. Sputter-ripple formation on flat and rough surfaces : a case study with Si 41 / Safiul Alam Mollick and Debabrata Ghose -- 3. Low-energy ion-induced pattern formation in Si-Ge alloy / Subhendu Sarkar -- 4. Patterning of ionic insulator surfaces with low-energy ion beams / Franciszek Krok. [et al.] -- 5. Nanostructures on thin films by keV ion beams / Prasanta Karmakar -- 6. Surface nanopatterns on Si(100) by normal-incidence ion sputtering with metal incorporation / Raul Gago. [et al.] -- 7. Kinetic Monte Carlo simulations of low-energy ion-induced surface patterning / Wai-Lun Chan and Eric Chason -- 8. From cascades to patterns : a Monte Carlo approach / Reiner Kree and Taha Yasseri -- 9. Understanding surface patterning by lattice gas models / Geza Odor, Bartosz Liedke, and Karl-Heinz Heinig -- 10. Applications of ion beam patterned substrates in plasmonics / Mukesh Ranjan, Thomas W.H. Oates, and Stefan Facsko.
9780429086540
10.1201/b13726 doi
Nanotechnology.
Materials science.
T174.7 / .N36 2013
620.5 / N186