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Micro electro-fabrication / edited by Tanveer Saleh, Mohamed Sultan Mohamed Ali, Kenichi Takahata. - 1 online resource - Micro and Nano Technologies . - Micro & nano technologies. .

Includes index.

ISBN: 9780128231807 0128231807

Nat. Bib. No.: GBC165560 bnb

Nat. Bib. Agency Control No.: 020173490 Uk

Subjects--Topical Terms:
Nanoelectronics.
Microfabrication.
Nano�electronique.
Microfabrication.
Microfabrication.
Nanoelectronics.

LC Class. No.: QC176.8.N35 / M53 2021 TJ1191.5

Dewey Class. No.: 620.5 670

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