High Permittivity Gate Dielectric Materials (Record no. 56752)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 03408nam a22005895i 4500 |
| 001 - CONTROL NUMBER | |
| control field | 978-3-642-36535-5 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20200421112043.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 130626s2013 gw | s |||| 0|eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9783642365355 |
| -- | 978-3-642-36535-5 |
| 082 04 - CLASSIFICATION NUMBER | |
| Call Number | 621.381 |
| 245 10 - TITLE STATEMENT | |
| Title | High Permittivity Gate Dielectric Materials |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | XXXII, 489 p. 325 illus., 168 illus. in color. |
| 490 1# - SERIES STATEMENT | |
| Series statement | Springer Series in Advanced Microelectronics, |
| 505 0# - FORMATTED CONTENTS NOTE | |
| Remark 2 | Historical Perspectives -- High Mobility Channels -- Non-Volatile Memory -- Hafnium-Based Gate Dielectric Materials -- Lanthanum-Based High-K Gate Dielectric Materials -- Crystalline High-K Gate Dielectric Materials -- High-K Gate Dielectric Processing.- Metal Gate Electrodes -- Flat-Band/Threshold Voltage Control -- Interfaces and Defects -- Electrical Characterization and Parameter Extraction -- Non-Contact Metrology of High-K Gate Dielectrics -- Channel Mobility -- High-K Gate Dielectric Reliability Issues -- Bias Temperature Instability -- Integration Issues. . |
| 520 ## - SUMMARY, ETC. | |
| Summary, etc | "The book comprehensively covers all the current and the emerging areas of the physics and the technology of high permittivity gate dielectric materials, including, topics such as MOSFET basics and characteristics, hafnium-based gate dielectric materials, Hf-based gate dielectric processing, metal gate electrodes, flat-band and threshold voltage tuning, channel mobility, high-k gate stack degradation and reliability, lanthanide-based high-k gate stack materials, ternary hafnia and lanthania based high-k gate stack films, crystalline high-k oxides, high mobility substrates, and parameter extraction. Each chapter begins with the basics necessary for understanding the topic, followed by a comprehensive review of the literature, and ultimately graduating to the current status of the technology and our scientific understanding and the future prospects.". |
| 700 1# - AUTHOR 2 | |
| Author 2 | Kar, Samares. |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | http://dx.doi.org/10.1007/978-3-642-36535-5 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | eBooks |
| 264 #1 - | |
| -- | Berlin, Heidelberg : |
| -- | Springer Berlin Heidelberg : |
| -- | Imprint: Springer, |
| -- | 2013. |
| 336 ## - | |
| -- | text |
| -- | txt |
| -- | rdacontent |
| 337 ## - | |
| -- | computer |
| -- | c |
| -- | rdamedia |
| 338 ## - | |
| -- | online resource |
| -- | cr |
| -- | rdacarrier |
| 347 ## - | |
| -- | text file |
| -- | |
| -- | rda |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Engineering. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Solid state physics. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Spectroscopy. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Microscopy. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Electronics. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Microelectronics. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Optical materials. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Electronic materials. |
| 650 14 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Engineering. |
| 650 24 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Electronics and Microelectronics, Instrumentation. |
| 650 24 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Optical and Electronic Materials. |
| 650 24 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Solid State Physics. |
| 650 24 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Spectroscopy and Microscopy. |
| 650 24 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Engineering, general. |
| 830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE | |
| -- | 1437-0387 ; |
| 912 ## - | |
| -- | ZDB-2-ENG |
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