Measurement technology for micro-nanometer devices / (Record no. 68636)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 02554cam a2200565 i 4500 |
| 001 - CONTROL NUMBER | |
| control field | ocn918986667 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20220711203310.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 150818s2017 si ob 001 0 eng |
| 019 ## - | |
| -- | 961207010 |
| -- | 962794062 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9781118717998 (epub) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 1118717996 (epub) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9781118717981 (pdf) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 1118717988 (pdf) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9781118717974 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 111871797X |
| 082 00 - CLASSIFICATION NUMBER | |
| Call Number | 681/.2 |
| 100 1# - AUTHOR NAME | |
| Author | Zhang, Wendong, |
| 245 10 - TITLE STATEMENT | |
| Title | Measurement technology for micro-nanometer devices / |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | 1 online resource. |
| 505 0# - FORMATTED CONTENTS NOTE | |
| Remark 2 | Geometry Measurements at the Micro/Nanoscale -- Dynamic Measurements at the Micro/Nanoscale -- Mechanical Characteristics Measurements -- SPM for MEMS/NEMS Measurements -- MEMS Online Measurements -- Typical Micro/Nanoscale Device Measurements. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| General subdivision | Measurement. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| General subdivision | Measurement. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| General subdivision | Testing. |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | https://doi.org/10.1002/9781118717974 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | eBooks |
| 264 #1 - | |
| -- | Solaris South Tower, Singapore : |
| -- | John Wiley & Sons, Inc., |
| -- | [2017] |
| 336 ## - | |
| -- | text |
| -- | txt |
| -- | rdacontent |
| 337 ## - | |
| -- | computer |
| -- | n |
| -- | rdamedia |
| 338 ## - | |
| -- | online resource |
| -- | nc |
| -- | rdacarrier |
| 588 ## - | |
| -- | Description based on print version record and CIP data provided by publisher. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Microtechnology |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Nanotechnology |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Microelectromechanical systems |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Physical measurements. |
| 650 #7 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | TECHNOLOGY & ENGINEERING / Technical & Manufacturing Industries & Trades |
| 994 ## - | |
| -- | 92 |
| -- | DG1 |
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