Optical inspection of microsystems / (Record no. 71972)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 04421cam a2200601Ii 4500 |
| 001 - CONTROL NUMBER | |
| control field | 9780429186738 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20220711212713.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 190624t20202020flua ob 001 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9780429186738 |
| -- | (electronic bk.) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 0429186738 |
| -- | (electronic bk.) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9780429547355 |
| -- | (electronic bk. : Mobipocket) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 0429547358 |
| -- | (electronic bk. : Mobipocket) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9780429532658 |
| -- | (electronic bk. : EPUB) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 0429532652 |
| -- | (electronic bk. : EPUB) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9781498779500 |
| -- | (electronic bk. : PDF) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 1498779506 |
| -- | (electronic bk. : PDF) |
| 082 04 - CLASSIFICATION NUMBER | |
| Call Number | 670.42/5 |
| 245 00 - TITLE STATEMENT | |
| Title | Optical inspection of microsystems / |
| 250 ## - EDITION STATEMENT | |
| Edition statement | Second edition. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | 1 online resource : |
| 520 ## - SUMMARY, ETC. | |
| Summary, etc | Where conventional testing and inspection techniques fail at the microscale, optical techniques provide a fast, robust, noninvasive, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems, Second Edition, extends and updates the first comprehensive survey of the most important optical measurement techniques to be successfully used for the inspection of microsystems. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image processing, image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moire techniques, interference microscopy, laser-Doppler vibrometry, digital holography, speckle metrology, spectroscopy, and sensor fusion technologies. They also examine modern approaches to data acquisition and processing, such as the determination of surface features and the estimation of uncertainty of measurement results. The book emphasizes the evaluation of various system properties and considers encapsulated components to increase quality and reliability. Numerous practical examples and illustrations of optical testing reinforce the concepts. Supplying effective tools for increased quality and reliability, this book: Provides a comprehensive, up-to-date overview of optical techniques for the measurement and inspection of microsystems; Discusses image correlation, displacement and strain measurement, electro-optic holography, and speckle metrology techniques; Offers numerous practical examples and illustrations; Includes calibration of optical measurement systems for the inspection of MEMS; Presents the characterization of dynamics of MEMS. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| General subdivision | Inspection. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| General subdivision | Optical methods. |
| 700 1# - AUTHOR 2 | |
| Author 2 | Osten, Wolfgang, |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | https://www.taylorfrancis.com/books/9780429186738 |
| 856 42 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | http://www.oclc.org/content/dam/oclc/forms/terms/vbrl-201703.pdf |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | eBooks |
| 264 #1 - | |
| -- | Boca Raton, FL : |
| -- | CRC Press/Taylor & Francis Group, |
| -- | [2020] |
| 264 #4 - | |
| -- | ©2020 |
| 336 ## - | |
| -- | text |
| -- | txt |
| -- | rdacontent |
| 337 ## - | |
| -- | computer |
| -- | c |
| -- | rdamedia |
| 338 ## - | |
| -- | online resource |
| -- | cr |
| -- | rdacarrier |
| 588 ## - | |
| -- | OCLC-licensed vendor bibliographic record. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Microelectromechanical systems |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Quality control |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Optical measurements. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Industrial microscopy. |
| 650 #7 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | TECHNOLOGY & ENGINEERING / Industrial Engineering. |
| 650 #7 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | TECHNOLOGY & ENGINEERING / Industrial Technology. |
| 650 #7 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | TECHNOLOGY & ENGINEERING / Manufacturing. |
| 650 #7 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | TECHNOLOGY & ENGINEERING / Technical & Manufacturing Industries & Trades. |
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