Cold plasma in materials fabrication : (Record no. 73973)
[ view plain ]
| 000 -LEADER | |
|---|---|
| fixed length control field | 03820nam a2200853 i 4500 |
| 001 - CONTROL NUMBER | |
| control field | 5271223 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20220712205711.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 100317t20151994njua ob 001 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9780470544273 |
| -- | electronic |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| -- | |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| -- | electronic |
| 082 04 - CLASSIFICATION NUMBER | |
| Call Number | 621.044 |
| 100 1# - AUTHOR NAME | |
| Author | Grill, Alfred, |
| 245 10 - TITLE STATEMENT | |
| Title | Cold plasma in materials fabrication : |
| Sub Title | from fundamentals to applications / |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | 1 PDF (xiii, 257 pages) : |
| 505 0# - FORMATTED CONTENTS NOTE | |
| Remark 2 | 1. Fundamentals of Plasma -- 2. Cold Plasma Generation -- 3. Plasma Chemistry -- 4. Plasma Reactors -- 5. Plasma Diagnostics -- 6. Cold Plasma Processes for Surface Modification -- 7. Deposition of Coatings by PECVD -- 8. Plasma Assisted Etching. |
| 520 ## - SUMMARY, ETC. | |
| Summary, etc | Cold plasma research and development activities, as well as its applications in materials processing have grown enormously in the past decade. Cold Plasma in Materials Fabrication is a comprehensive, up-to-date monograph which presents all aspects of cold, low-pressure plasmas. The eight extensive chapters in this book cover the following topics: . The main parameters and classifications of different types of plasma. Reactions within cold plasmas and between cold plasmas and solid surfaces. State-of-the-art methods for generation and diagnostics of cold plasmas and their application for processing of materials This invaluable reference tool provides a helpful bibliography with suggestions for further reading on each subject. The book will be of importance to manufacturing engineers and scientists, as well as advanced students in engineering, materials, physics, and chemistry programs. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| Subject | Plasma engineering. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| Subject | Low temperature plasmas. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| Subject | Manufacturing processes. |
| 856 42 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | https://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5271223 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | eBooks |
| 264 #1 - | |
| -- | Piscataway, New Jersey : |
| -- | IEEE Press, |
| -- | c1994. |
| 264 #2 - | |
| -- | [Piscataqay, New Jersey] : |
| -- | IEEE Xplore, |
| -- | [1994] |
| 336 ## - | |
| -- | text |
| -- | rdacontent |
| 337 ## - | |
| -- | electronic |
| -- | isbdmedia |
| 338 ## - | |
| -- | online resource |
| -- | rdacarrier |
| 588 ## - | |
| -- | Description based on PDF viewed 12/21/2015. |
| 695 ## - | |
| -- | Adhesives |
| 695 ## - | |
| -- | Atomic measurements |
| 695 ## - | |
| -- | Biographies |
| 695 ## - | |
| -- | Cathodes |
| 695 ## - | |
| -- | Chemical vapor deposition |
| 695 ## - | |
| -- | Chemicals |
| 695 ## - | |
| -- | Discharges |
| 695 ## - | |
| -- | Electric fields |
| 695 ## - | |
| -- | Electrodes |
| 695 ## - | |
| -- | Etching |
| 695 ## - | |
| -- | Gases |
| 695 ## - | |
| -- | Glow discharges |
| 695 ## - | |
| -- | Indexes |
| 695 ## - | |
| -- | Inductors |
| 695 ## - | |
| -- | Ionization |
| 695 ## - | |
| -- | Ions |
| 695 ## - | |
| -- | Nitrogen |
| 695 ## - | |
| -- | Plasma chemistry |
| 695 ## - | |
| -- | Plasma diagnostics |
| 695 ## - | |
| -- | Plasma temperature |
| 695 ## - | |
| -- | Plasmas |
| 695 ## - | |
| -- | Plastics |
| 695 ## - | |
| -- | Polymer films |
| 695 ## - | |
| -- | Polymers |
| 695 ## - | |
| -- | Radio frequency |
| 695 ## - | |
| -- | Spectroscopy |
| 695 ## - | |
| -- | Substrates |
| 695 ## - | |
| -- | Surface cleaning |
| 695 ## - | |
| -- | Surface treatment |
No items available.