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Crystal growth and evaluation of silicon for VLSI and ULSI / Golla Eranna.

By: Eranna, G [author.].
Material type: materialTypeLabelBookPublisher: Boca Raton, FL : CRC Press : Taylor & Francis Group, 2015Copyright date: ©2015Description: 1 online resource.Content type: text Media type: computer Carrier type: online resourceISBN: 9780429068393.Subject(s): Crystal growth | SiliconAdditional physical formats: Print version: : No titleDDC classification: 548.5 Online resources: Click here to view.
Contents:
1. Introduction -- 2. Silicon : the key material for integrated circuit fabrication technology -- 3. Importance of single crystals for integrated circuit fabrication -- 4. Different techniques for growing single-crystal silicon -- 5. From silicon ingots to silicon wafers -- 6. Evaluation of silicon wafers -- 7. Resistivity and impurity concentration mapping of silicon wafers -- 8. Impurities in silicon wafers -- 9. Defects in silicon wafers -- 10. Silicon wafer preparation for VLSI and ULSI processing -- 11. Packing of silicon wafers.
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A Chapman and Hall book.

1. Introduction -- 2. Silicon : the key material for integrated circuit fabrication technology -- 3. Importance of single crystals for integrated circuit fabrication -- 4. Different techniques for growing single-crystal silicon -- 5. From silicon ingots to silicon wafers -- 6. Evaluation of silicon wafers -- 7. Resistivity and impurity concentration mapping of silicon wafers -- 8. Impurities in silicon wafers -- 9. Defects in silicon wafers -- 10. Silicon wafer preparation for VLSI and ULSI processing -- 11. Packing of silicon wafers.

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