FATIKOW,S <br/><br/>
MICROSYSTEM TECHNOLOGY AND MICROROBOTICS 

 - BERLIN  Springer  1997 
 - xii+408p.,24X17Cms. 
<br/><br/><label>ISBN: </label>3540606580 
<br/><br/><label>Dewey Class. No.: </label>621.381 F298