ALLEN, J.J. <br/><br/>
MICRO ELECTRO MECHANICAL SYSTEM DESIGN 

 - Boca Raton  CRC  2005 
 - xxiv+465p.,23x16cms. 
<br/><br/><label>ISBN: </label>0824758242 
<br/><br/><label>Dewey Class. No.: </label>621.381 A427