Hsu, Tai, Ran. <br/><br/>
MEMS and Microsystems: Design and Manufacture 

 - New Delhi  Tata McGraw-Hill Education  2002 
 - p. 436 
<br/><br/><label>ISBN: </label>9780070487093 
<br/><br/><label>Subjects--Topical Terms: </label> Thermofluid Engineering  Scaling Laws  Microsystems Design  Laminar 
<br/><br/><label>Dewey Class. No.: </label>621.381 H87M