Nano-tribology and Materials in MEMS  [electronic resource] / 
edited by Sujeet K. Sinha, N. Satyanarayana, Seh Chun Lim. 
 - VIII, 275 p. 157 illus., 89 illus. in color.  online resource. 
<br/><br/>Formation of arrayed Au nanoparticles on SiO2/Si substrate by use of dewetting phenomenon: An example of bottom-up technologies in MEMS -- Nanofriction by Reciprocating Sliding -- The structure and tribological behaviors of nanostructure thin films -- Detection of lateral forces and formation of atomic chains -- Reducing friction force on silicon surface using submicron- to atomic-scale geometry effects -- Microfabricated sleds for friction studies -- Vapor Phase Lubrication-Nanotribology Fundamentals and MEMS Applications -- A Novel Method of Lubrication of Micro-Electro-Mechanical Systems -- Robust Tribological Solutions for Silicon and Polymer Based MEMS/NEMS -- Lubrication of High Sliding MEMS -- Pre-modifications of Si surface to enhance the wear durability of PFPE nano-lubricant -- Probing the complexities of Friction in submicron contacts between two pristine surfaces -- Atomistic Simulation of Polymer Nanotribology -- Simulation of frictional behavior of polymer-on-polymer sliding -- Fundamentals of friction and wear mechanisms at loads relevant to MEMS applications. 
<br/><br/> This book brings together recent developments in the areas of MEMS tribology, novel lubricants and coatings for nanotechnological applications, biomimetics in tribology and fundamentals of micro/nano-tribology. Tribology plays important roles in the functioning and durability of machines at small length scales because of the problems associated with strong surface adhesion, friction, wear etc. Recently, a number of studies have been conducted to understand tribological phenomena at nano/micro scales and many new tribological solutions for MEMS have been proposed. 
<br/><br/><label>ISBN: </label>9783642369353 
<br/><br/><label>Standard No.: </label>10.1007/978-3-642-36935-3  doi 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Engineering.<br/>Nanotechnology.<br/>Mechatronics.<br/>Tribology.<br/>Corrosion and anti-corrosives.<br/>Coatings.<br/>Engineering.<br/>Nanotechnology and Microengineering.<br/>Tribology, Corrosion and Coatings.<br/>Mechatronics.
<br/><br/><label>LC Class. No.: </label>T174.7 
<br/><br/><label>Dewey Class. No.: </label>620.5