Corigliano, Alberto, <br/><br/>
Mechanics of microsystems / 
by Alberto Corigliano, Dr. Raffaele Ardito, Dr. Claudia Comi, Dr. Attilio Frangi, Dr. Aldo Ghisi, Dr. Stefano Mariani. 
 - 1 online resource. 
 - Microsystem and nanotechnology series ;  7646 .
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>9781119053804 1119053803 9781119053828 111905382X 9781119053811 1119053811 
<br/><br/><label>Source: </label>873C83BA-B901-4898-91F3-BB1B54599026  OverDrive, Inc.  http://www.overdrive.com 
<br/><br/><label>LCCN: </label>2017052694 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/>TECHNOLOGY & ENGINEERING--Mechanical.<br/>Microelectromechanical systems.
<br/><br/><label>Index Terms--Genre/Form: </label><br/>Electronic books.
<br/><br/><label>LC Class. No.: </label>TK7875 
<br/><br/><label>Dewey Class. No.: </label>621.381