Zhang, Wendong, <br/><br/>
Measurement technology for micro-nanometer devices / 
Wendong Zhang, Xiujian Chou, Zongmin Ma, North University of China, Tielin Shi, Huazhong Univ. of Science and Technology, Haifei Bao, Jing Chen, Liguo Chen, Chenyang Xue, Dachao Li, Tianjin University. 
 - 1 online resource. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/>Geometry Measurements at the Micro/Nanoscale -- Dynamic Measurements at the Micro/Nanoscale -- Mechanical Characteristics Measurements -- SPM for MEMS/NEMS Measurements -- MEMS Online Measurements -- Typical Micro/Nanoscale Device Measurements. 
<br/><br/><label>ISBN: </label>9781118717998 (epub) 1118717996 (epub) 9781118717981 (pdf) 1118717988 (pdf) 9781118717974 111871797X 
<br/><br/><label>LCCN: </label>2015032319 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microtechnology--Measurement.<br/>Nanotechnology--Measurement.<br/>Microelectromechanical systems--Testing.<br/>Physical measurements.<br/>TECHNOLOGY & ENGINEERING / Technical & Manufacturing Industries & Trades
<br/><br/><label>Index Terms--Genre/Form: </label><br/>Electronic books.<br/>Electronic books.
<br/><br/><label>LC Class. No.: </label>TA418.9.N35 
<br/><br/><label>Dewey Class. No.: </label>681/.2