Compact plasma and focused ion beams - Bhattacharjee, Sudeep (Boca Raton : Taylor & Francis, 2014)
1. Introduction -- 2. Review of the cutoff problem -- 3. Plasma and wave diagnostics -- 4. Genesis of a wave induced discharge : a new perspective -- 5. Plasma production in continuous-mode microwaves : near-circular multicusp -- 6. Plasma production in continuous-mode microwaves : rectangular nonmulticusp waveguide -- 7. Comparison of square and near-circular multicusp waveguides -- 8. Plasma production in pulsed-mode microwaves : general experiment -- 9. Plasma production in pulsed-mode microwaves : circular multicusp waveguide with a dimension below cutoff -- 10. Plasma buildup by short-pulse, high-power microwaves -- 11. Power absorption and intense collimated beam production in a pulsed high-power microwave ion source -- 12. New experiments in continuous-mode microwaves : formation of standing waves and electron trapping -- 13. Penetration and screening of perpendicularly launched electromagnetic waves -- 14. Wave birefringence in perpendicular propagation -- 15. Electron localization and trapping physics revisited -- 16. New experiments in pulsed microwaves : quasisteady-state interpulse plasmas -- 17. Electron plasma waves inside large-amplitude electromagnetic pulses -- 18. Transition from interpulse to afterglow plasmas -- 19. Introduction to focused ion beams -- 20. Experimental setup for basic plasma studies -- 21. Basic beam studies : extraction and ion energy distribution -- 22. Multielement focused ion beam -- 23. Focused ion beam experiments -- 24. Summary and future prospects.
Keywords: Microwave plasmas; Plasma (Ionized gases); Focused ion beams