Sarangan, Andrew, <br/><br/>
Nanofabrication :  principles to laboratory practice / 
Andrew Sarangan, University of Dayton, OH, USA. 
 - 1 online resource 
 - Optical sciences and applications of light .
 - Optical sciences and applications of light. .
<br/><br/>Chapter 1. Introduction to micro- and nanofabrication -- Chapter 2. Fundamentals of vacuum and plasma technology -- Chapter 3. Physical and chemical vapor deposition -- Chapter 4. Thin-film optics -- Chapter 5. Substrate materials -- Chapter 6. Lithography -- Chapter 7. Wet chemical and plasma etching -- Chapter 8. Doping, surface modifications, and metal contacts -- Chapter 9. Metrology for device fabrication. 
<br/><br/><label>ISBN: </label>9781315370514 9781315334363 
<br/><br/><label>Standard No.: </label>10.1201/9781315370514   doi 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Etching.<br/>Nanostructured materials--Design and construction.<br/>Nanoelectronics--Experiments.<br/>Nanolithography.
<br/><br/><label>LC Class. No.: </label>TK7874.843  / .S27 2017 
<br/><br/><label>Dewey Class. No.: </label>621.381531  / S243