Eranna, G., <br/><br/>
Crystal growth and evaluation of silicon for VLSI and ULSI / 
Golla Eranna. 
 - 1 online resource 
<br/><br/> A Chapman and Hall book. 
<br/><br/>1. Introduction -- 2. Silicon : the key material for integrated circuit fabrication technology -- 3. Importance of single crystals for integrated circuit fabrication -- 4. Different techniques for growing single-crystal silicon -- 5. From silicon ingots to silicon wafers -- 6. Evaluation of silicon wafers -- 7. Resistivity and impurity concentration mapping of silicon wafers -- 8. Impurities in silicon wafers -- 9. Defects in silicon wafers -- 10. Silicon wafer preparation for VLSI and ULSI processing -- 11. Packing of silicon wafers. 
<br/><br/><label>ISBN: </label>9780429068393 
<br/><br/><label>Standard No.: </label>10.1201/b17812   doi 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Crystal growth.<br/>Silicon.
<br/><br/><label>LC Class. No.: </label>QD921  / .E73 2015 
<br/><br/><label>Dewey Class. No.: </label>548.5  / E652