Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting [electronic resource] / by Xiao-Sheng Zhang.
By: Zhang, Xiao-Sheng [author.]
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Contributor(s): SpringerLink (Online service).
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BookSeries: Springer Theses, Recognizing Outstanding Ph.D. Research: Publisher: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2016Edition: 1st ed. 2016.Description: XX, 122 p. 95 illus., 76 illus. in color. online resource.Content type: text Media type: computer Carrier type: online resourceISBN: 9783662488164.Subject(s): Microtechnology | Microelectromechanical systems | Energy harvesting | Electronics | Nanotechnology | Microsystems and MEMS | Energy Harvesting | Electronics and Microelectronics, Instrumentation | NanotechnologyAdditional physical formats: Printed edition:: No title; Printed edition:: No title; Printed edition:: No titleDDC classification: 621.381 Online resources: Click here to access online
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Springer Nature eBookSummary: This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.
This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.
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