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Atomic layer processing : semiconductor dry etching technology / Thorsten Lill.

by Lill, Thorsten [author.].

Material type: book Book; Format: available online remote; Literary form: Not fiction Publisher: Weinheim, Germany : Wiley-VCH, 2021Online access: Wiley Online Library Availability: No items available

Nanofabrication : principles to laboratory practice / Andrew Sarangan, University of Dayton, OH, USA.

by Sarangan, Andrew [author.].

Material type: book Book; Literary form: Not fiction Publisher: Boca Raton : CRC Press, Taylor & Francis Group, [2017]Copyright date: ©2017Online access: Click here to view. Availability: No items available