000 00383nam a2200133Ia 4500
008 190711s9999 xx 000 0 und d
020 _a0780333438
082 _a621.38175 I 22
100 _aIEEE ELECTRON DEVICES SOCIETY
245 0 _a1996 SYMPOSIUM ON VLSI TECHNOLOGY DIGEST OF TECHNICAL PAPERS
260 _aUSA
_bIEEE Press
_c1996
300 _a247P.,28X31CMS.
942 _cBK
_2DDC
999 _c26740
_d26740