000 00353nam a2200133Ia 4500
008 190711s9999 xx 000 0 und d
020 _a3540253777
082 _a620.5 M214
100 _aMAHALIK, N.P. Edr.
245 0 _aMICROMANUFACTURING AND NANOTECHNOLOGY
260 _aNEW YORK
_bSpringer
_c2006
300 _axxiii+468p.,24X16Cms
942 _cBK
_2DDC
999 _c32311
_d32311