000 02650nam a22004935i 4500
001 978-3-642-34428-2
003 DE-He213
005 20200421111705.0
007 cr nn 008mamaa
008 130107s2013 gw | s |||| 0|eng d
020 _a9783642344282
_9978-3-642-34428-2
024 7 _a10.1007/978-3-642-34428-2
_2doi
050 4 _aT174.7
072 7 _aTDPB
_2bicssc
072 7 _aTEC027000
_2bisacsh
082 0 4 _a620.5
_223
100 1 _aZhou, Weimin.
_eauthor.
245 1 0 _aNanoimprint Lithography: An Enabling Process for Nanofabrication
_h[electronic resource] /
_cby Weimin Zhou.
264 1 _aBerlin, Heidelberg :
_bSpringer Berlin Heidelberg :
_bImprint: Springer,
_c2013.
300 _aXIII, 249 p. 225 illus., 107 illus. in color.
_bonline resource.
336 _atext
_btxt
_2rdacontent
337 _acomputer
_bc
_2rdamedia
338 _aonline resource
_bcr
_2rdacarrier
347 _atext file
_bPDF
_2rda
505 0 _aPrinciples and statues of nanoimprint lithography -- Stamp Fabrication -- stamp surface treatment -- Nanoimprint lithography resists -- Nanoimprint lithography process -- Modeling and Simulation of NIL -- Application of NIL in Light emitting Diodes -- Application of NIL in memory devices -- Application of NIL in solar cell.
520 _aNanoimprint Lithography: An enabling process for nanofabrication presents a comprehensive description of nanotechnology that is one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures, and an emerging lithography candidates for 22, 16 and 11 nm nodes. It provides the exciting, multidisciplinary field, offering a wide range of topics covering: principles, process, material and application. This book would be of specific interest for researchers and graduate students in the field of nanoscience, nanotechnology and nanofabrication, material, physical, chemical, electric engineering and biology. Dr. Weimin Zhou is an associate professor at Shanghai Nanotechnology Promotion Center, China.
650 0 _aEngineering.
650 0 _aNanochemistry.
650 0 _aNanotechnology.
650 0 _aOptical materials.
650 0 _aElectronic materials.
650 1 4 _aEngineering.
650 2 4 _aNanotechnology and Microengineering.
650 2 4 _aOptical and Electronic Materials.
650 2 4 _aNanotechnology.
650 2 4 _aNanochemistry.
710 2 _aSpringerLink (Online service)
773 0 _tSpringer eBooks
776 0 8 _iPrinted edition:
_z9783642344275
856 4 0 _uhttp://dx.doi.org/10.1007/978-3-642-34428-2
912 _aZDB-2-ENG
942 _cEBK
999 _c55201
_d55201