000
00275nam a2200121Ia 4500
008
200906s9999 xx 000 0 und d
082
_a
621.38175 S997
100
_a
SZE.S.M
245
0
_a
VLSI TECHNOLOGY
260
_b
MCGRAW, OUCKLAND
_c
1983
300
_a
21X15
942
_c
BK
999
_c
62493
_d
62493