| 000 | 02554cam a2200565 i 4500 | ||
|---|---|---|---|
| 001 | ocn918986667 | ||
| 003 | OCoLC | ||
| 005 | 20220711203310.0 | ||
| 006 | m o d | ||
| 007 | cr ||||||||||| | ||
| 008 | 150818s2017 si ob 001 0 eng | ||
| 010 | _a 2015032319 | ||
| 040 |
_aDLC _beng _erda _cDLC _dN$T _dDG1 _dUIU _dIDEBK _dYDX _dOCLCO |
||
| 019 |
_a961207010 _a962794062 |
||
| 020 | _a9781118717998 (epub) | ||
| 020 | _a1118717996 (epub) | ||
| 020 | _a9781118717981 (pdf) | ||
| 020 | _a1118717988 (pdf) | ||
| 020 | _z9781118717967 (cloth) | ||
| 020 | _a9781118717974 | ||
| 020 | _a111871797X | ||
| 020 | _z1118717961 (cloth) | ||
| 035 |
_a(OCoLC)918986667 _z(OCoLC)961207010 _z(OCoLC)962794062 |
||
| 042 | _apcc | ||
| 050 | 0 | 0 | _aTA418.9.N35 |
| 072 | 7 |
_aTEC _x040000 _2bisacsh |
|
| 082 | 0 | 0 |
_a681/.2 _223 |
| 049 | _aMAIN | ||
| 100 | 1 |
_aZhang, Wendong, _eauthor. _96266 |
|
| 245 | 1 | 0 |
_aMeasurement technology for micro-nanometer devices / _cWendong Zhang, Xiujian Chou, Zongmin Ma, North University of China, Tielin Shi, Huazhong Univ. of Science and Technology, Haifei Bao, Jing Chen, Liguo Chen, Chenyang Xue, Dachao Li, Tianjin University. |
| 264 | 1 |
_aSolaris South Tower, Singapore : _bJohn Wiley & Sons, Inc., _c[2017] |
|
| 300 | _a1 online resource. | ||
| 336 |
_atext _btxt _2rdacontent |
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| 337 |
_acomputer _bn _2rdamedia |
||
| 338 |
_aonline resource _bnc _2rdacarrier |
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| 504 | _aIncludes bibliographical references and index. | ||
| 588 | _aDescription based on print version record and CIP data provided by publisher. | ||
| 505 | 0 | _aGeometry Measurements at the Micro/Nanoscale -- Dynamic Measurements at the Micro/Nanoscale -- Mechanical Characteristics Measurements -- SPM for MEMS/NEMS Measurements -- MEMS Online Measurements -- Typical Micro/Nanoscale Device Measurements. | |
| 650 | 0 |
_aMicrotechnology _xMeasurement. _96267 |
|
| 650 | 0 |
_aNanotechnology _xMeasurement. _96268 |
|
| 650 | 0 |
_aMicroelectromechanical systems _xTesting. _96269 |
|
| 650 | 0 |
_aPhysical measurements. _96270 |
|
| 650 | 7 |
_aTECHNOLOGY & ENGINEERING / Technical & Manufacturing Industries & Trades _2bisacsh _95059 |
|
| 655 | 4 |
_aElectronic books. _93294 |
|
| 655 | 7 |
_aElectronic books. _2local _93294 |
|
| 776 | 0 | 8 |
_iPrint version: _aZhang, Wendong, author. _tMeasurement technology for micro-nanometer devices _dSolaris South Tower, Singapore : John Wiley & Sons, Inc., [2016] _z9781118717967 _w(DLC) 2015026167 |
| 856 | 4 | 0 |
_uhttps://doi.org/10.1002/9781118717974 _zWiley Online Library |
| 942 | _cEBK | ||
| 994 |
_a92 _bDG1 |
||
| 999 |
_c68636 _d68636 |
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