| 000 | 03820nam a2200853 i 4500 | ||
|---|---|---|---|
| 001 | 5271223 | ||
| 003 | IEEE | ||
| 005 | 20220712205711.0 | ||
| 006 | m o d | ||
| 007 | cr |n||||||||| | ||
| 008 | 100317t20151994njua ob 001 0 eng d | ||
| 020 |
_a9780470544273 _qelectronic |
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| 020 |
_z9780780347144 _qprint |
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| 020 |
_z0470544279 _qelectronic |
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| 024 | 7 |
_a10.1109/9780470544273 _2doi |
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| 035 | _a(CaBNVSL)mat05271223 | ||
| 035 | _a(IDAMS)0b000064810cc99a | ||
| 040 |
_aCaBNVSL _beng _erda _cCaBNVSL _dCaBNVSL |
||
| 050 | 4 |
_aTA2020 _b.G75 1994eb |
|
| 082 | 0 | 4 |
_a621.044 _222 |
| 100 | 1 |
_aGrill, Alfred, _eauthor. _927124 |
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| 245 | 1 | 0 |
_aCold plasma in materials fabrication : _bfrom fundamentals to applications / _cAlfred Grill. |
| 264 | 1 |
_aPiscataway, New Jersey : _bIEEE Press, _cc1994. |
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| 264 | 2 |
_a[Piscataqay, New Jersey] : _bIEEE Xplore, _c[1994] |
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| 300 |
_a1 PDF (xiii, 257 pages) : _billustrations. |
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| 336 |
_atext _2rdacontent |
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| 337 |
_aelectronic _2isbdmedia |
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| 338 |
_aonline resource _2rdacarrier |
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| 504 | _aIncludes bibliographical references and index. | ||
| 505 | 0 | _a1. Fundamentals of Plasma -- 2. Cold Plasma Generation -- 3. Plasma Chemistry -- 4. Plasma Reactors -- 5. Plasma Diagnostics -- 6. Cold Plasma Processes for Surface Modification -- 7. Deposition of Coatings by PECVD -- 8. Plasma Assisted Etching. | |
| 506 | 1 | _aRestricted to subscribers or individual electronic text purchasers. | |
| 520 | _aCold plasma research and development activities, as well as its applications in materials processing have grown enormously in the past decade. Cold Plasma in Materials Fabrication is a comprehensive, up-to-date monograph which presents all aspects of cold, low-pressure plasmas. The eight extensive chapters in this book cover the following topics: . The main parameters and classifications of different types of plasma. Reactions within cold plasmas and between cold plasmas and solid surfaces. State-of-the-art methods for generation and diagnostics of cold plasmas and their application for processing of materials This invaluable reference tool provides a helpful bibliography with suggestions for further reading on each subject. The book will be of importance to manufacturing engineers and scientists, as well as advanced students in engineering, materials, physics, and chemistry programs. | ||
| 530 | _aAlso available in print. | ||
| 538 | _aMode of access: World Wide Web | ||
| 588 | _aDescription based on PDF viewed 12/21/2015. | ||
| 650 | 0 |
_aPlasma engineering. _911979 |
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| 650 | 0 |
_aLow temperature plasmas. _927125 |
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| 650 | 0 |
_aManufacturing processes. _93276 |
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| 655 | 0 |
_aElectronic books. _93294 |
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| 695 | _aAdhesives | ||
| 695 | _aAtomic measurements | ||
| 695 | _aBiographies | ||
| 695 | _aCathodes | ||
| 695 | _aChemical vapor deposition | ||
| 695 | _aChemicals | ||
| 695 | _aDischarges | ||
| 695 | _aElectric fields | ||
| 695 | _aElectrodes | ||
| 695 | _aEtching | ||
| 695 | _aGases | ||
| 695 | _aGlow discharges | ||
| 695 | _aIndexes | ||
| 695 | _aInductors | ||
| 695 | _aIonization | ||
| 695 | _aIons | ||
| 695 | _aNitrogen | ||
| 695 | _aPlasma chemistry | ||
| 695 | _aPlasma diagnostics | ||
| 695 | _aPlasma temperature | ||
| 695 | _aPlasmas | ||
| 695 | _aPlastics | ||
| 695 | _aPolymer films | ||
| 695 | _aPolymers | ||
| 695 | _aRadio frequency | ||
| 695 | _aSpectroscopy | ||
| 695 | _aSubstrates | ||
| 695 | _aSurface cleaning | ||
| 695 | _aSurface treatment | ||
| 710 | 2 |
_aJohn Wiley & Sons, _epublisher. _96902 |
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| 710 | 2 |
_aIEEE Xplore (Online service), _edistributor. _927126 |
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| 776 | 0 | 8 |
_iPrint version: _z9780780347144 |
| 856 | 4 | 2 |
_3Abstract with links to resource _uhttps://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5271223 |
| 942 | _cEBK | ||
| 999 |
_c73973 _d73973 |
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