Principles of microelectromechanical systems / (Record no. 74095)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 03202nam a2200997 i 4500 |
| 001 - CONTROL NUMBER | |
| control field | 5628438 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20220712205747.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 151221s2010 nju ob 001 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9780470649671 |
| -- | ebook |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| -- | cloth |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| -- | cloth |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| -- | electronic |
| 082 00 - CLASSIFICATION NUMBER | |
| Call Number | 621.381 |
| 100 1# - AUTHOR NAME | |
| Author | Lee, Ki Bang, |
| 245 10 - TITLE STATEMENT | |
| Title | Principles of microelectromechanical systems / |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | 1 PDF (xii, 667 pages). |
| 505 0# - FORMATTED CONTENTS NOTE | |
| Remark 2 | Microfabrication -- Statics -- Static behavior of microstructures -- Dynamics -- Fluid dynamics -- Electromagnetics -- Piezoelectric and thermal actuators -- Electrostatic and electromagnetic actuators -- Sensors. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| Subject | Microelectromechanical systems. |
| 700 1# - AUTHOR 2 | |
| Author 2 | Lee, Ki Bang. |
| 856 42 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | https://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5628438 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | eBooks |
| 264 #1 - | |
| -- | Hoboken, New Jersey : |
| -- | WILEY/IEEE Press, |
| -- | c2011. |
| 264 #2 - | |
| -- | [Piscataqay, New Jersey] : |
| -- | IEEE Xplore, |
| -- | [2010] |
| 336 ## - | |
| -- | text |
| -- | rdacontent |
| 337 ## - | |
| -- | electronic |
| -- | isbdmedia |
| 338 ## - | |
| -- | online resource |
| -- | rdacarrier |
| 588 ## - | |
| -- | Description based on PDF viewed 12/21/2015. |
| 695 ## - | |
| -- | Actuators |
| 695 ## - | |
| -- | Bibliographies |
| 695 ## - | |
| -- | Bridge circuits |
| 695 ## - | |
| -- | Capacitance |
| 695 ## - | |
| -- | Capacitors |
| 695 ## - | |
| -- | Closed-form solution |
| 695 ## - | |
| -- | Damping |
| 695 ## - | |
| -- | Electromagnetics |
| 695 ## - | |
| -- | Electrostatic actuators |
| 695 ## - | |
| -- | Electrostatics |
| 695 ## - | |
| -- | Equations |
| 695 ## - | |
| -- | Fabrication |
| 695 ## - | |
| -- | Face |
| 695 ## - | |
| -- | Fluid dynamics |
| 695 ## - | |
| -- | Force |
| 695 ## - | |
| -- | Friction |
| 695 ## - | |
| -- | Gravity |
| 695 ## - | |
| -- | Heating |
| 695 ## - | |
| -- | Indexes |
| 695 ## - | |
| -- | Inductors |
| 695 ## - | |
| -- | Magnetic cores |
| 695 ## - | |
| -- | Manganese |
| 695 ## - | |
| -- | Materials |
| 695 ## - | |
| -- | Mathematical model |
| 695 ## - | |
| -- | Mechanical sensors |
| 695 ## - | |
| -- | Microelectromechanical systems |
| 695 ## - | |
| -- | Microelectronics |
| 695 ## - | |
| -- | Micromachining |
| 695 ## - | |
| -- | Micromechanical devices |
| 695 ## - | |
| -- | Microstructure |
| 695 ## - | |
| -- | Oscillators |
| 695 ## - | |
| -- | Petroleum |
| 695 ## - | |
| -- | Resistors |
| 695 ## - | |
| -- | Sensors |
| 695 ## - | |
| -- | Silicon |
| 695 ## - | |
| -- | Springs |
| 695 ## - | |
| -- | Strain |
| 695 ## - | |
| -- | Stress |
| 695 ## - | |
| -- | Structural beams |
| 695 ## - | |
| -- | Substrates |
No items available.