Principles of microelectromechanical systems / Ki Bang Lee.
By: Lee, Ki Bang [author.]
.
Contributor(s): Lee, Ki Bang | IEEE Xplore (Online Service) [distributor.] | John Wiley & Sons [publisher.].
Material type: 
BookPublisher: Hoboken, New Jersey : WILEY/IEEE Press, c2011Distributor: [Piscataqay, New Jersey] : IEEE Xplore, [2010]Description: 1 PDF (xii, 667 pages).Content type: text Media type: electronic Carrier type: online resourceISBN: 9780470649671.Other title: Principles of MEMS.Subject(s): Microelectromechanical systems | Actuators | Bibliographies | Bridge circuits | Capacitance | Capacitors | Closed-form solution | Damping | Electromagnetics | Electrostatic actuators | Electrostatics | Equations | Fabrication | Face | Fluid dynamics | Force | Friction | Gravity | Heating | Indexes | Inductors | Magnetic cores | Manganese | Materials | Mathematical model | Mechanical sensors | Microelectromechanical systems | Microelectronics | Micromachining | Micromechanical devices | Microstructure | Oscillators | Petroleum | Resistors | Sensors | Silicon | Springs | Strain | Stress | Structural beams | SubstratesGenre/Form: Electronic books.Additional physical formats: Print version:: No titleDDC classification: 621.381 Online resources: Abstract with links to resource Also available in print.Includes bibliographical references and index.
Microfabrication -- Statics -- Static behavior of microstructures -- Dynamics -- Fluid dynamics -- Electromagnetics -- Piezoelectric and thermal actuators -- Electrostatic and electromagnetic actuators -- Sensors.
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Mode of access: World Wide Web
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