Principles of microelectromechanical systems / Ki Bang Lee.
By: Lee, Ki Bang [author.]
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Contributor(s): Lee, Ki Bang
| IEEE Xplore (Online Service) [distributor.]
| John Wiley & Sons [publisher.]
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Material type: 

Includes bibliographical references and index.
Microfabrication -- Statics -- Static behavior of microstructures -- Dynamics -- Fluid dynamics -- Electromagnetics -- Piezoelectric and thermal actuators -- Electrostatic and electromagnetic actuators -- Sensors.
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Also available in print.
Mode of access: World Wide Web
Description based on PDF viewed 12/21/2015.
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